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interferoMETER 5200-TH

Hochpräzise Dickenmessungen von dünnsten Schichten

Materialstärke ab 1 µm

Sub-Nanometer Auflösung

Weißlicht-Interferometer zur stabilen Dickenmessung mit Submikrometer-Genauigkeit

Das neue Weißlichtinterferometer IMS5200-TH eröffnet neue Perspektiven für eine schnelle und stabile Dickenmessung. Der Controller verfügt über eine intelligente Auswertung und ermöglicht die präzise Dickenmessung von transparenten Schichten bereits ab 1 µm Materialstärke. Dank der hohen Messrate von bis zu 24 kHz sind die IMS5200 Modelle bestens für den industriellen Einsatz geeignet. Nanometergenauigkeit für mikrometer-dünne Schichten.

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Besonderheiten

  1. Messrate bis 24 kHz für schnelle stabile Messungen
  2. Einfache Integration dank großem Arbeitsbereich
  3. Präzise Schichtdickenmessung: 1 µm bis 100 µm
  4. Multi-Peak: Mehrschichtmessung von bis zu 5 Schichten möglich
  5. Industrieoptimierter Sensor mit robustem Metallgehäuse
  6. Einsatz im Vakuum möglich
  7. Einfache Konfiguration über Webinterface
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Dickenmessung bei schwankenden Messabständen
Bei Luftspaltmessung zwischen zwei Glasplatten (n~1) beträgt der Messbereich 1,5 µm … 150 µm. Bei Glasdickenmessung (mit Brechungsindex ~1,5) 1µm bis 100 µm.

Stabile Dickenmessung bei schwankenden Messabständen

Das Weißlicht-Interferometer IMS5200-TH wird für hochgenaue Dickenmessungen eingesetzt. Ein entscheidender Vorteil ist dabei die abstandsunabhängige Messung, bei der ein nanometergenauer Dickenwert auch bei bewegten Objekten erzielt wird. Der Messbereich von 1 bis 100 µm ermöglicht die Messung von dünnen transparenten Schichten und Folien.

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Mehrschicht-Dickenmessung

Mit der Multipeak-Controllervariante können mehrere Signalpeaks gleichzeitig ausgewertet werden. Dadurch kann eine Mehrschicht-Dickenmessung von transparenten Objekten oder Verbundgläsern durchgeführt werden. Der Controller gibt die Dickenwerte mit höchster Stabilität unabhängig von ihrer Lage aus.

Ideal für industrielle Umgebungen

Der robuste Sensor und der Controller im Metallgehäuse prädestinieren das System zur Integration in Fertigungslinien. Durch den kompakten Sensoraufbau und dem großen Arbeitsbereich ist der Sensor leicht zu integrieren und liefert auch bei Vibration stabile Messergebnisse. Der Controller kann per Hutschienenmontage im Schaltschrank verbaut werden. Kabellängen bis zu 10 m ermöglichen eine räumliche Trennung von Sensor und Controller. Die Inbetriebnahme und Parametrierung erfolgt bequem per Webinterface und erfordert keine Software-Installation.

Zahlreiche Modelle für anspruchsvolle Messaufgaben

Modell Messbereich / Messbereichsanfang Linearität Anzahl messbarer Schichten Einsatzbereiche
IMS5200-TH26 26 mm ±2 mm / 1µm bis 100 µm  < 1 nm 1 Schicht Schnelle stabile Inlinemessung von dünnen transparenten Schichten: z.B. Beschichtung auf Folien und Glas
IMS5200-TH26/VAC
IMS5200MP-TH26 Bis zu 5 Schichten

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